Micro-electro-mechanical system fluid control
US12304804B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jun 15, 2022 |
| Grant date | May 20, 2025 |
| Priority date | — |
| Expiry date | Jun 15, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D16/06
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A fluid-control device comprises a stack of wafers in which flow components are provided as micro-electro-mechanical systems—MEMS. The flow components are selected from fluid-control components and/or fluid-monitor components. The fluid-control device has a first flow component that is encircled, in a main plane of the stack of wafers, by a second flow component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.