Space transformers configured to be utilized in a probe system, probe systems that include the space transformers, and related methods

US12306243B2 · kind B2 · utility

Assignee

• FormFactor, Inc. · US

Inventors

• Ernest Gammon McReynolds · Portland, US
• Timothy Lesher · Beaverton, US
• Pratik Bakul Ghate · Beaverton, US
• Shean Thomas McMahon · Henry's Drive, US
• Jerry Martynuik · Beaverton, US
• David Raschko · Tigard, US
• Daniel Bock · Heidelberg, DE
• Andrew J. Nelson · New City, US

Key dates

• Filing date: Jun 7, 2024
• Grant date: May 20, 2025
• Expiry date: Jun 7, 2044

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R1/07342
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Space transformers configured to be utilized in a probe system to facilitate electrical communication with a device under test (DUT), probe systems that include the space transformers, and related methods are disclosed herein. The space transformers include a dielectric body, a plurality of first electrical contacts supported by the dielectric body, and a plurality of second electrical contacts supported by the dielectric body. The space transformers also include an electrically conductive radio frequency (RF) signal-modifying trace. The space transformers further include an RF electrical signal-modifying structure in electrical communication with the electrically conductive RF signal-modifying trace. The RF electrical signal-modifying structure is configured to receive the RF electrical signal from an input region of the electrically conductive RF signal-modifying trace and to discharge a modified RF electrical signal to an output region of the electrically conductive RF signal-modifying trace. The RF electrical signal-modifying structure includes a coupler.