Integrated electromagnetic-acoustic sensor and sensing
US12306354B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2024 |
| Grant date | May 20, 2025 |
| Priority date | — |
| Expiry date | Jan 30, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S15/931
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
One illustrative integrated electromagnetic-acoustic sensor includes: a ground plane; a patch antenna above the ground plane to send or receive an electromagnetic (EM) signal having an EM signal frequency; and an array of capacitive micromachined acoustic transducers formed by cavities between the patch antenna and a base electrode to send or receive an acoustic signal having an acoustic signal frequency. One illustrative sensing method includes: driving or sensing a EM signal between a ground plane and a patch antenna; and driving or sensing an acoustic signal between the patch antenna and a base electrode, the base electrode and the patch antenna having an array of capacitive micromachined acoustic transducer cavities therebetween.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.