Two-axis scanning mirror using piezoelectric drivers and serpentine torsion springs
US12306398B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 30, 2021 |
| Grant date | May 20, 2025 |
| Priority date | — |
| Expiry date | Dec 11, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a skeleton on a back surface of the MEMS scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of serpentine torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of serpentine torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a first axis, and the second pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a second axis orthogonal to the first axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.