Calibration scale, calibration method and apparatus, and detection method and apparatus
US12307719B2 · kind B2 · utility
0Cited by
7References
15Claims
0Family size
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Key dates
| Filing date | Aug 2, 2023 |
| Grant date | May 20, 2025 |
| Priority date | — |
| Expiry date | Dec 26, 2043 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A calibration scale includes a scale body and at least two calibration pattern subsets arranged on the scale body along a first direction. The at least two calibration pattern subsets include a plurality of first calibration blocks arranged at spacings along the first direction and staggered along a second direction. Projections of the plurality of first calibration blocks in each calibration pattern subset along the first direction have a first overlapping area. Projections of at least two first overlapping areas along the first direction have a second overlapping area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.