Light source apparatus
US12308200B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 12, 2023 |
| Grant date | May 20, 2025 |
| Priority date | — |
| Expiry date | Jul 4, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0092
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A light source apparatus includes a beam introduction section, a plate member, a raw material supply section, and a radiation extraction section. The beam introduction section introduces an energy beam. The plate member has a front surface and a back surface, is disposed at a location where the introduced energy beam is incident onto the front surface, and is rotatable around a direction orthogonal to the front surface as its rotation axis direction. The raw material supply section supplies plasma raw material to an incident area in the front surface to generate plasma. The radiation extraction section extracts and emits radiation from the generated plasma. The plate member is disposed such that the normal axis of the incident area in the front surface is off from a between-axes area configured between an incident axis of the energy beam incident onto the incident area and an emission axis of the radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.