Light source apparatus and inspection apparatus
US12308600B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 19, 2022 |
| Grant date | May 20, 2025 |
| Priority date | — |
| Expiry date | Dec 31, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/0092
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A decrease of an output of a wavelength converted light converted by a nonlinear optical crystal is suppressed. A light source apparatus according to the present disclosure includes a fundamental wave light source configured to generate a fundamental wave which is a continuous oscillation laser beam, an external cavity including a plurality of optical mirrors, a nonlinear optical crystal installed inside the external cavity and configured to generate a light with a wavelength shorter than that of the fundamental wave. The light source apparatus includes at least one phase modulator disposed between the fundamental wave light source and the external cavity and configured to modulate the fundamental wave by a modulation frequency of an integer multiple of a resonance frequency interval of the external cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.