Subtractive microfabrication and functionalization of substrates by hydrodynamic flow confinements
US12311360B2 · kind B2 · utility
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17Claims
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Key dates
| Filing date | Jan 14, 2021 |
| Grant date | May 27, 2025 |
| Priority date | — |
| Expiry date | Mar 30, 2044 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L2400/0463
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Patterning a substrate can be provided. A substrate is covered by an immersion liquid and a microfluidic probe head is positioned in proximity with the surface of the substrate, so as to immerse a processing surface of the probe head in the immersion liquid. Liquid flows are generated between the processing surface of the probe head and the surface of the substrate, via the probe head. The liquid flows generated include an etching flow of an etching liquid (e.g., an acid or solvent) and a processing flow of a processing liquid (e.g., a solution or suspension).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.