Patent · US Active

Etchant composition and manufacturing method of display device using the same

US12312528B2 · kind B2 · utility

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20Claims
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Key dates

Filing dateMay 26, 2022
Grant dateMay 27, 2025
Priority date
Expiry dateDec 3, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K2102/103
  • WIPO fieldBasic materials chemistry
  • WIPO sectorChemistry

Abstract

An etchant composition includes: an inorganic acid compound at 9.0 wt % to 9.9 wt %; an inorganic salt compound at 5.0 wt % to 10.0 wt %; an organic acid compound at 35 wt % to 45 wt %; a lactate-based compound at 10 wt % to 20 wt %; a nitrogen cyclic compound containing oxygen at 0.1 wt % to 1.0 wt %; and a remaining amount of water such that a total weight of the etchant composition is 100 wt %, wherein the inorganic acid compound is an etchant composition having an acid dissociation constant (pKa) value of −1.0 to −3.0.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.