Mask plate assembly
US12312669B2 · kind B2 · utility
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1References
12Claims
0Family size
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Key dates
| Filing date | Mar 10, 2021 |
| Grant date | May 27, 2025 |
| Priority date | — |
| Expiry date | Sep 26, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask plate assembly is provided, including a first mask plate and multiple types of first mask strips having different effective evaporation patterns, where the first mask plate includes a first frame and a first support strip arranged between a set of opposite sides of the first frame, a first hollowed-out portion including multiple first holes is arranged in a first region of the first support strip, and the multiple first holes are used for cooperating with the multiple types of first mask strips for evaporation to form different first functional structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.