Device and method for determining a focal point

US12313455B2 · kind B2 · utility

Assignee

• Primes GmbH Messtechnik für die Produktion mit Laserstrahlung · DE

Inventors

• Reinhard Kramer · Pfungstadt, DE
• Otto Märten · Dreieich, DE
• Stefan Wolf · Schwieberdingen, DE
• Johannes Roßnagel · Mainz, DE
• Marc Hänsel · Darmstadt, DE
• Roman Niedrig · Berlin, DE

Key dates

• Filing date: Dec 14, 2021
• Grant date: May 27, 2025
• Expiry date: Jun 9, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J1/0477
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

The invention relates to a beam analysis device (10) for determining the axial position of the focal point (71) of an energy beam or a sample beam (70) decoupled from an energy beam, comprising a beam-shaping device (12), a detector (40), and an analysis device (45). The beam-shaping device (12) is designed to release two sub-beams (72, 73) from the sample beam (70) on a plane of the sub-beam release process (19). The cross-sections of the two sub-beams (72, 73) are defined by sub-apertures (32, 33) which are delimited from each other and which are arranged at a distance k to each other in a first lateral direction (31). The beam-shaping device (12) is designed to image the two sub-beams (72, 73) in order to form two beam spots (92, 93) on the detector and deflect at least one of the two sub-beams (72, 73) in a second lateral direction (37) which is oriented transversely to the first lateral direction (31) in order to form a distance w in the second lateral direction (37) between the two beam spots (92, 93). The analysis device (45) is designed to determine the distance a along the first lateral direction (31) between positions of the two beam spots (92, 93) on the detector (40) an…