Patent · US Active

Light reflection support and through hole inspection system

US12313568B1 · kind B1 · utility

0Cited by
1References
8Claims
0Family size

Assignees

Inventors

Key dates

Filing dateAug 26, 2024
Grant dateMay 27, 2025
Priority date
Expiry dateAug 26, 2044

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B2210/42
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An embodiment provides a light reflection support and a through hole inspection system including the same, wherein the light reflection support stably fixes and supports a glass substrate, an inspection target, and reflects illumination light to a lower part of a glass substrate arranged on the opposite side of an imaging part to increase inspection precision from a clear imaged image of a through hole. The light reflection support is used in a device that images a through hole formed in a substrate and inspects whether the through hole is normal from the imaged image, and includes a transparent support part and a reflection layer part. The transparent support part supports the substrate and has a suction hole that extends to a solid area of the substrate where the through hole is not formed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.