Patent · US Active

Optical interference filter

US12313870B2 · kind B2 · utility

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20Claims
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Inventors

Key dates

Filing dateSep 12, 2022
Grant dateMay 27, 2025
Priority date—
Expiry dateAug 10, 2043

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B5/288
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

In some implementations, an optical interference filter includes a substrate and one or more sets of layers that are disposed on the substrate. Each set of layers includes: a first layer that comprises at least tantalum and oxygen (e.g., a tantalum pentoxide (Ta2O5) material); a second layer that comprises at least aluminum and nitrogen (e.g., an aluminum nitride (AlN) material); and a third layer that comprises at least hydrogen and silicon (e.g., a hydrogenated silicon (Si:H) material). The second layer is disposed between the first layer and the third layer. In some implementations, a first surface of the second layer is disposed on a surface of the first layer, and a second surface of the second layer is disposed on a surface of the third layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.