Water replenishment control method for semiconductor process device and semiconductor process device
US12314066B1 · kind B1 · utility
0Cited by
3References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 24, 2023 |
| Grant date | May 27, 2025 |
| Priority date | — |
| Expiry date | May 24, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67155
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A water supply control method includes: obtaining water supply time period information that each of the plurality of furnace tubes needs to reserve; according to the water supply time period information that each of the plurality of furnace tubes needs to reserve, updating a reservation queue at a current moment; and according to the water supply time period information in the updated reservation queue, setting the liquid evaporator to be in an available state or an unavailable state for each of the plurality of furnace tubes, such that the liquid evaporator supplies water to only one furnace tube at a time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.