Carrier device, semiconductor apparatus, and residual charge detection method
US12315706B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 8, 2021 |
| Grant date | May 27, 2025 |
| Priority date | — |
| Expiry date | Dec 12, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present disclosure discloses a carrier device, a semiconductor apparatus, and a residual charge detection method. The disclosed carrier device is configured to carry a wafer in a semiconductor apparatus. The carrier device includes an electrostatic carrier plate and at least three positioning members, wherein the electrostatic carrier plate includes a carrying surface configured to carry the wafer; the at least three positioning members are arranged around the carrying surface at intervals along a circumferential direction of the carrying surface, each positioning member is provided with a position limiting segment, and the at least three position limiting segments form a position limiting space above the carrying surface. An opening size of the position limiting space increases along a direction away from the carrying surface. The above-mentioned solution can solve the problem that a position deviation of the wafer is relatively large due to incomplete charge removal of the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.