Gas curtain device for front opening unified pod
US12315750B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 8, 2022 |
| Grant date | May 27, 2025 |
| Priority date | — |
| Expiry date | Nov 8, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67772
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A gas curtain device for a front opening unified pod has a casing. At least one first gas guide plate is disposed in the casing. The first gas guide plate has a first gas guide region. The first gas guide region has a plurality of first gas guide holes. A second gas guide plate is disposed at a distal end of the casing. The second gas guide plate has a second gas guide region. The second gas guide region has a plurality of second gas guide holes. The area of the first gas guide region is less than the area of the second gas guide region. The number of the second gas guide holes is greater than the number of the first gas guide holes. The total area of the second gas guide holes is greater than the total area of the first gas guide holes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.