Methods related to gradient raised frames in film bulk acoustic resonators
US12316296B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jun 28, 2024 |
| Grant date | May 27, 2025 |
| Priority date | — |
| Expiry date | Jun 28, 2044 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4908
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Methods related to gradient raised frames in film bulk acoustic resonators. According to certain aspects, a method for fabricating a film bulk acoustic resonator device can include: forming a first metal layer over a substrate; forming a piezoelectric layer; forming a second metal layer, the piezoelectric layer positioned between the first and second metal layers; and forming a gradient raised frame implemented relative to one of the first and second metal layers and configured to improve reflection of lateral mode waves and to reduce conversion of main mode waves into lateral mode waves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.