Substrate transfer robot and method of controlling the same
US12318946B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2024 |
| Grant date | Jun 3, 2025 |
| Priority date | — |
| Expiry date | Jun 12, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/43203
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A substrate transfer robot includes a robot body including a first hand having a first substrate placing part on which a substrate is placed and a first substrate holding mechanism configured to hold and release the substrate, and a robot controller. The robot controller controls a speed of the first hand such that an absolute value of a first maximum speed or an absolute value of a first maximum acceleration during a first period after the first hand starts retreating until the substrate is held by the first substrate holding mechanism is lower than an absolute value of a second maximum speed or an absolute value of a second acceleration during a second period after the substrate is held until the first hand ends retreating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.