High-temperature quartz insert design for controlling material input
US12320000B2 · kind B2 · utility
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9References
20Claims
0Family size
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Key dates
| Filing date | Dec 12, 2022 |
| Grant date | Jun 3, 2025 |
| Priority date | — |
| Expiry date | Sep 21, 2043 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K51/02
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A flow through valve can satisfy the manufacturing constraints encountered when handling materials at high temperatures and low pressures, for example during semiconductor thin-film manufacturing using techniques such as vapor transport deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.