Laterally excited bulk wave resonator and fabricating method thereof
US12323126B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 17, 2022 |
| Grant date | Jun 3, 2025 |
| Priority date | — |
| Expiry date | Jul 12, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/174
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A laterally excited bulk wave resonator includes a supporting plate; a piezoelectric base having a back side attached to the supporting plate, in which a cavity is defined on a side of the supporting plate facing toward the piezoelectric base; a lower interdigital transducer provided at a back side of the piezoelectric base and located in the cavity; and an upper interdigital transducer provided at a front side of the piezoelectric base corresponding to the lower interdigital transducer. A first interdigital electrode of the lower interdigital transducer has a same polarity as a second interdigital electrode of the upper interdigital transducer at a position corresponding to the first interdigital electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.