Responsivity enhanced photodetector with photon-trapping nanostructures
US12326519B2 · kind B2 · utility
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Key dates
| Filing date | Jul 18, 2023 |
| Grant date | Jun 10, 2025 |
| Priority date | — |
| Expiry date | Jul 18, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S17/89
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A back-illuminated photo detector array (PDA) includes a front side and a back side. The back side receives optical energy incident on the back side at an incident direction. The front side includes a detection layer that includes detection structures and a plurality of photon-trapping nanostructures (PTN). The PTN cause optical energy incident on the back side to disperse in a direction perpendicular to the incident direction, and thereby improve an absorption efficiency of the back-illuminated PDA.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.