Bulk acoustic wave resonator with improved structures
US12329035B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2022 |
| Grant date | Jun 10, 2025 |
| Priority date | — |
| Expiry date | Apr 13, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/176
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic wave resonator includes a substrate, and a stack that is supported by the substrate. The stack includes a first electrode, a multilayer buffer, a piezoelectric layer, and a second electrode. The multilayer buffer is disposed between the first electrode and the piezoelectric layer, and the piezoelectric layer is disposed between the multilayer buffer and the second electrode. The multilayer buffer includes two or more pairs of alternating layers. A first pair of the two or more pairs include a first layer of crystalline material having a first lattice constant, and a second layer of crystalline material having a lattice constant that is distinct from the first lattice constant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.