Comb-driven MEMS resonant scanner with full-circumferential range and large out-of-plane translational displacement
US12332428B2 · kind B2 · utility
0Cited by
9References
14Claims
0Family size
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Key dates
| Filing date | Mar 18, 2020 |
| Grant date | Jun 17, 2025 |
| Priority date | — |
| Expiry date | Jan 21, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B23/2423
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A scanning assembly for an optical instrument includes a reflector and a folded-beam spring assembly coupled to the reflector for deflecting the reflector for beam scanning. A lever suspension assembly is coupled to the folded-beam spring assembly and provides torsional movement of the reflector for beam scanning over a two-dimensional region, allowing for large total scan angles and large vertical displacements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.