Lithium-based piezoelectric micromachined ultrasonic transducer
US12337347B2 · kind B2 · utility
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3References
13Claims
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Key dates
| Filing date | Nov 17, 2021 |
| Grant date | Jun 24, 2025 |
| Priority date | — |
| Expiry date | Apr 25, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/87
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A device includes a pair of substrate layer corresponding to a carrier substrate, an intermediary layer disposed on the pair of substrate layers, a cavity region disposed between the pair of substrate layers underneath the intermediary layer, a piezoelectric layer including a lithium-based film disposed on the intermediary layer, and a plurality of interdigital transducer electrodes disposed on the piezoelectric layer. The plurality of interdigital transducer electrodes includes an outer signal electrode, an inner signal electrode, an outer ground electrode and an inner ground electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.