Dual-output microelectromechanical resonator and method of manufacture and operation thereof
US12338119B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Mar 18, 2024 |
| Grant date | Jun 24, 2025 |
| Priority date | — |
| Expiry date | Mar 18, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2250/00
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An example resonating structure comprises a substrate, a resonator body, and an anchoring body for anchoring the resonator body to the substrate. The resonator body is doped with a dopant having a concentration chosen so as to minimize a second order temperature coefficient of frequency for the resonator body. The resonator body is operable in an in-plane mode of vibration and an out-of-plane mode of vibration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.