Low loss transversely-excited film bulk acoustic resonators and filters
US12341490B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2022 |
| Grant date | Jun 24, 2025 |
| Priority date | — |
| Expiry date | Aug 24, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02157
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator device includes a portion of a piezoelectric plate is a diaphragm spanning a cavity in a substrate. A conductor pattern on a surface of the piezoelectric plate includes an interdigital transducer (IDT) with a first busbar, a second busbar, and a plurality of interleaved fingers extending alternately from the first and second busbars, first and second reflector elements proximate and parallel to a first finger of the interleaved fingers, and third and fourth reflector element proximate and parallel to a last finger of the interleaved fingers. Overlapping portions of the interleaved fingers and the first to fourth reflector elements are on the diaphragm. pr1 is a center-to-center distance of the first and second reflector elements and a center-to-center distance of the third and fourth reflector elements, p is a pitch of the interleaved fingers, and 1.1p≤pr1≤1.5p.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.