Transversely-excited film bulk acoustic resonators with busbar side edges that form angles with a perimeter of the cavity
US12341492B2 · kind B2 · utility
1Cited by
67References
20Claims
0Family size
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Key dates
| Filing date | Sep 28, 2021 |
| Grant date | Jun 24, 2025 |
| Priority date | — |
| Expiry date | Apr 25, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/021
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator has a piezoelectric plate attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. An interdigital transducer (IDT) formed on the plate has interleaved fingers on the diaphragm with first parallel fingers extending from a first busbar and second parallel fingers extending from a second busbar of the IDT. The first and second busbars of the IDT terminate in beveled corners that extend off of the diaphragm as side edges of the busbars that form angles with a perimeter of the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.