Low loss transversely-excited film bulk acoustic resonators and filters
US12341493B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2021 |
| Grant date | Jun 24, 2025 |
| Priority date | — |
| Expiry date | Oct 6, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/174
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator device includes a diaphragm including a portion of the piezoelectric plate spanning a cavity in a substrate. A conductor pattern on a surface of the piezoelectric plate includes an interdigital transducer (IDT) with a first busbar, a second busbar, and a plurality of interleaved fingers, wherein the plurality of interleaved fingers extend alternately from the first and second busbars, overlapping portions of the plurality of interleaved fingers on the diaphragm. The conductor pattern also includes first and second reflector elements on the diaphragm proximate and parallel to a first finger of the plurality of interleaved fingers, and third and fourth reflector element on the diaphragm proximate and parallel to a last finger of the plurality of interleaved fingers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.