Driving belt inspection device and method for wafer transfer module
US12344482B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2023 |
| Grant date | Jul 1, 2025 |
| Priority date | — |
| Expiry date | Feb 14, 2044 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2201/0297
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A driving belt inspection device and method for a wafer transfer module is disclosed. The driving belt inspection device for a wafer transfer module includes: a data receiving unit for receiving current data of a motor connected to a driving belt; a calculation unit for calculating the rate of change of instantaneous current of the motor according to the received current data and acquiring a calculated value for inspection according to the calculated rate of change of instantaneous current of the motor; and a result determination unit for determining, if the calculated value is lower than a first reference value, that the driving belt is in a normal operation state, and determining, if the calculated value is higher than a second reference value, that the driving belt is in an abnormal operation state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.