Ultrasonic element and ultrasonic device
US12350711B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 15, 2021 |
| Grant date | Jul 8, 2025 |
| Priority date | — |
| Expiry date | May 8, 2044 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B1/0696
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An ultrasonic element includes a substrate in which an opening is formed, a vibrating plate provided at the substrate, the vibrating plate including a first surface in contact with the substrate, the vibrating plate blocking the opening, a piezoelectric element provided at a second surface on an opposite side from the first surface of the vibrating plate, a protective substrate facing the second surface and protecting the piezoelectric element, and a suppressing unit provided between the protective substrate and the vibrating plate, the suppressing unit being configured to suppress a vibration of the vibrating plate, in which in the piezoelectric element, a first electrode, a piezoelectric layer, and a second electrode are stacked in this order from the second surface, and an active part is a part of the vibrating plate where the first electrode, the piezoelectric layer, and the second electrode overlap, the suppressing unit is provided around the active part, and a slit is formed in the suppressing unit, in plan view from a stacking direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.