Active gas generation apparatus
US12354845B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2021 |
| Grant date | Jul 8, 2025 |
| Priority date | — |
| Expiry date | Dec 8, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/327
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
One direction discharge structure in an active gas generation apparatus satisfies arrangement conditions (a) to (c). The condition (a) is a condition that a region where a corresponding metal electrode and a corresponding metal electrode are overlapped with each other in a plan view serves as a corresponding discharge space in a corresponding gap region. The condition (b) is a condition that the corresponding gap region and a plurality of gas supply holes provided in a corresponding gas supply region are overlapped with each other in a plan view. The condition (c) is a condition that the plurality of gas supply holes provided in the corresponding gas supply region and a plurality of gas ejection holes provided below the corresponding gap region sandwich the corresponding discharge space in a plan view, and are disposed to face each other on a one-to-one basis along a Y direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.