Dual-diaphragm MEMS transducers with high effective area
US12356167B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | May 26, 2022 |
| Grant date | Jul 8, 2025 |
| Priority date | — |
| Expiry date | Feb 14, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical systems (MEMS) diaphragm assembly comprises a first diaphragm and a second diaphragm, a geometric central region surrounding the geometric center of the diaphragm assembly, and a plurality of pillars connecting the first and second diaphragms, each of the plurality of pillars having a cross-sectional shape having a maximum radial dimension, A, and a maximum circumferential dimension, B, wherein at least a first subset of the plurality of pillars is disposed within the geometric central region and wherein A is greater than B for the at least first sub set.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.