Liquid dispersion and powder of cerium based core-shell particles, process for producing the same and uses thereof in polishing
US12359091B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Nov 25, 2020 |
| Grant date | Jul 15, 2025 |
| Priority date | — |
| Expiry date | Sep 4, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/10
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
The invention relates to cerium based core-shell particles having a core of cerium oxide optionally doped with at least one metal (M) and a shell consisting of a plurality of nanoparticles of cerium oxide optionally doped with at least one metal (M′), which can be the same or different from metal (M), formed on the surface of the core particle. The invention also relates to dispersions thereof in a liquid medium, to a process for producing the same and to the use of these particles and dispersions in polishing applications such as chemical mechanical polishing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.