Sensor
US12359986B2 · kind B2 · utility
0Cited by
0References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 31, 2024 |
| Grant date | Jul 15, 2025 |
| Priority date | — |
| Expiry date | Jul 31, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/87
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor that includes: a piezoelectric film; a first electrode arranged above the piezoelectric film, and overlapping at least a part of the piezoelectric film; a second electrode arranged below the piezoelectric film, and overlapping at least a part of the piezoelectric film; and an insulator layer arranged above the first electrode, and overlapping at least a part of the first electrode, in which at least a part of an outer edge of the insulator layer does not overlap the first electrode, and is located below an upper principal surface of the first electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.