Device that includes a MEMS tunable filter and a method for operating the device
US12360147B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2020 |
| Grant date | Jul 15, 2025 |
| Priority date | — |
| Expiry date | Jul 19, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides, among other aspects, a technique, employed in a system and method, for monitoring a state of a tunable optical filter, typically a MEMS tunable filter such as a Fabry-Perot filter. The technique utilizes application of an actuation voltage signal characterized by a first component configured for causing a movement of a movable optical member of the tunable filter and a second component configured for being responsive for each given state of the tunable filter, i.e each optical gap results in a different response of the second component. The response of the second component to the state of the tunable filter, i.e. its variation profile from the original applied second component of the voltage signal is being indicative of the state of the tunable filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.