Patent · US Active

Optical assembly, method for deforming an optical element, and projection exposure system

US12360459B2 · kind B2 · utility

0Cited by

5References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Tim Hoffmann · Aalen, DE
Vladimir Mitev · Aalen, DE
Eva Schneider · Koblenzer Straße, DE
Ruediger Mack · Langenau, DE
Johannes Schurer · Heidenheim, DE
Maike Lorenz · Aalen, DE

Key dates

Filing date	Aug 22, 2023
Grant date	Jul 15, 2025
Priority date	—
Expiry date	Feb 2, 2044

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/18
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical assembly has an optical element for influencing the beam path in a projection exposure apparatus and an actuator device for deforming the optical element. The actuator device has at least one photostrictive component and at least one light source. The photostrictive component is mechanically coupled to the optical element for the transmission of a tensile and/or compressive force in order to deform the optical element. The light source is configured for targeted illumination of the photostrictive component in order to induce the tensile and/or compressive force in the photostrictive component.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.