Apparatus, method, and recording medium storing command for controlling thin-film deposition process
US12365980B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 8, 2023 |
| Grant date | Jul 22, 2025 |
| Priority date | — |
| Expiry date | Feb 8, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure discloses an apparatus. The apparatus according to the present disclosure may include a communication interface, one or more memories, and one or more processors. The one or more processors may be configured to: control the thin-film deposition devices to execute the thin-film deposition process by accessing the memory and executing a recipe; obtain in-process thin-film state data of the thin film from the thin-film measurement result received via the communication interface during the thin-film deposition process; and derive post-process thin-film state data of the thin film from the process condition data, the sensing data, and the in-process thin-film state data using a first correlation model.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.