Graded-index polymer waveguide and manufacturing method thereof

US12366707B2 · kind B2 · utility

Assignee

• SHENNAN CIRCUITS CO., LTD. · CN

Inventors

• Xiaofeng Liu · Dallas, US
• Guodong Wang · Changchun, CN
• Hua Miao · Nanhu, CN
• Tengfei Yao · Lo Wu, CN
• Rui Wang · Xiangtan City, CN
• Yongkai Li · Lo Wu, CN

Key dates

• Filing date: Oct 31, 2022
• Grant date: Jul 22, 2025
• Expiry date: Jul 22, 2043

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B1/046
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A graded-index polymer waveguide (30) and a manufacturing method thereof are provided. The method includes providing a waveguide substrate (1); manufacturing a waveguide lower cladding layer (2) on a surface of the waveguide substrate (1); coating a material of a waveguide core layer (3) having UV photosensitivity on a surface of the waveguide lower cladding layer (2) away from the waveguide substrate (1); performing a hot imprinting process for the material of the waveguide core layer by means of a flexible transfer film mold and forming a waveguide core layer (3) having an imprinted waveguide link structure; performing a heat treatment process for the waveguide core layer (3); performing a pre-exposure process for the waveguide core layer; coating a waveguide upper cladding layer on a surface of a waveguide core layer (3); and curing the waveguide core layer (3) and the waveguide upper cladding layer (4).