Selector with superlattice-like structure and preparation method thereof

US12369502B2 · kind B2 · utility

Assignee

• Huazhong University of Science and Technology · CN

Inventors

• Hao Tong · Hubei, CN
• Lun Wang · Beijing, CN
• Weiguo Wang · Milton, CA
• Xiangshui Miao · Hubei, CN

Key dates

• Filing date: Dec 1, 2021
• Grant date: Jul 22, 2025
• Expiry date: Dec 3, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N70/8845

Abstract

A selector with a superlattice-like structure and a preparation method thereof are provided, which belong to the technical field of micro-nano electronics. The selector includes a substrate, and a first metal electrode layer, a superlattice-like layer, and a second metal electrode layer sequentially stacked on the substrate. The superlattice-like layer includes n+1 first sublayers and n second sublayers alternately stacked periodically. A material of the first sublayer is amorphous carbon, and a material of the second sublayer is a chalcogenide with gating property.