Micro-nano channel structure, sensor and manufacturing method thereof, and microfluidic device
US12371316B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 22, 2023 |
| Grant date | Jul 29, 2025 |
| Priority date | — |
| Expiry date | Nov 22, 2043 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/036
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro-nano channel structure, a method for manufacturing the micro-nano channel structure, a sensor, a method for manufacturing the sensor, and a microfluidic device are provided. The micro-nano channel structure includes: a base substrate; a base layer, on the base substrate and including a plurality of protrusions; a channel wall layer, on a side of the plurality of the protrusions away from the base substrate, the channel wall layer has a micro-nano channel; a recessed portion is provided between adjacent protrusions of the plurality of the protrusions, an orthographic projection of the micro-nano channel on the base substrate is located within an orthographic projection of the recessed portion on the base substrate. The micro-nano channels have a high resolution or an ultra-high resolution, and have different sizes and shapes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.