3D profilometry with a Linnik interferometer
US12372345B2 · kind B2 · utility
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55Claims
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Key dates
| Filing date | Aug 1, 2022 |
| Grant date | Jul 29, 2025 |
| Priority date | — |
| Expiry date | Jan 11, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for generating volumetric data are disclosed. Such systems and methods may include scanning a sample at a plurality of focal planes located along a depth direction of the sample. Such systems and methods may include generating, via a detector of a metrology sub-system, a plurality of images of a volumetric field of view of the sample at the plurality of focal planes. Such systems and methods may include aggregating the plurality of images to generate volumetric data of the volumetric field of view of the sample. The metrology sub-system may include a Linnik interferometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.