Electrothermal characterization of micro-scale and nano-scale samples and related systems
US12372489B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2022 |
| Grant date | Jul 29, 2025 |
| Priority date | — |
| Expiry date | Apr 10, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Transient techniques for electrothermal characterization of small (e.g., micro-scale or nano-scale) samples are described. These techniques overcome some of the limitations existing in conventional approaches. These transient techniques involve causing a temperature variation inside a sample, and determining a transient signal response (e.g., a voltage rise or drop) arising in the sample as a result of the temperature variation. In some embodiments, the temperature variation may be caused by allowing amplitude modulated electric current (e.g., stepped current or periodic stepped current) to flow through the sample. Alternatively, or additionally, the temperature variation may be caused by controlling a laser source to irradiate the sample. Thermal characteristics of the sample (e.g., thermal diffusivity, thermal conductivity, specific heat) can be determined based on the transient response. These transient techniques can be executed by a computer system in an automatic fashion, e.g., without having to rely on a user to manually pre-process the measurement data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.