Method of controlling mixed liquid to be delivered for SPM solution
US12372988B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 16, 2025 |
| Grant date | Jul 29, 2025 |
| Priority date | — |
| Expiry date | Jan 16, 2045 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6704
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method of controlling mixed liquid to be delivered for SPM solution includes: before the SPM solution comes into an acid scouring tank, mixing the sulfuric acid with the hydrogen peroxide in a delivering pipe in a first stage and a second stage in turn, so as to make a mixed liquid after mixing in the first stage to further get mixed in the second stage; heating the mixed liquid in the first stage; monitoring an oxygen concentration value of the mixed liquid flowing out after mixing in the first stage; and if the oxygen concentration value is smaller than an oxygen concentration value at full reaction, adding supplementary sulfuric acid and hydrogen peroxide during mixing in the second stage, so as to enable the oxygen concentration value of the mixed liquid flowing out after mixing in the second stage monitored in real time to reach an oxygen concentration value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.