Mass flow controller with advanced back streaming diagnostics
US12379238B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2019 |
| Grant date | Aug 5, 2025 |
| Priority date | — |
| Expiry date | Sep 9, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A diagnostics system comprising a controller for controlling operations of a mass flow controller. The controller is communicable coupled to at least one sensor and to a valve and tuned to control the valve based on a predetermined set point value and communication from the at least one sensor. The controller determines at least one predetermined value associated with a reverse flow of a fluid and either cause the controller to enter a hard fault or a safe state. The predetermined value of the flow is either a percentage of total flow or a percentage of total flow over a time period. The controller can log the date, time, and a device identifier in response to determining the at least one predetermined value. In addition, the diagnostics system can include a centralized controller configured to receive diagnostics data from a plurality of controllers and control operation of the controllers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.