Dark-field microscopy imaging apparatus
US12379326B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 16, 2022 |
| Grant date | Aug 5, 2025 |
| Priority date | — |
| Expiry date | Nov 15, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8822
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus includes a main body, circuit assembly, lens, and clamping assembly. The main body includes an aperture that receives a wafer configured to receive a sample under study. The main body is configured to support the circuit assembly, which includes illumination sources that emit light of different colors such that total internal reflection is generated in the wafer. The main body is configured to provide support for the lens, and the clamping assembly mechanically coupled to the main body such that the lens is selectively positionable with respect to a camera lens. A microscopy imaging apparatus includes an illumination source, wafer, and charge-coupled device. The illumination source is configured to emit white light such that total internal reflection is generated in the wafer. The sample under study is disposed between the wafer and the charge coupled device, and the charge coupled device is configured to obtain an image of the sample under study upon illumination of the wafer by the illumination source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.