Pin lifting device having a temperature sensor
US12381108B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2019 |
| Grant date | Aug 5, 2025 |
| Priority date | — |
| Expiry date | Jun 24, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K13/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a pin lifting device is designed for moving and positioning a substrate to be processed in a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin designed to contact and support the substrate, and further comprises a drive part having a drive unit adapted to cooperate with the coupling such that the coupling is linearly adjustable along an adjustment axis from a lowered normal position to an extended support position and back. The pin lifting device has at least one temperature sensor, where the temperature sensor is designed and arranged such that a measurement signal representing thermal information with respect to at least part of the pin lifting device can be generated by means of the temperature sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.