Piezoelectric mems valve for an electronic device
US12382833B2 · kind B2 · utility
0Cited by
7References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2023 |
| Grant date | Aug 5, 2025 |
| Priority date | — |
| Expiry date | Jan 27, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2460/11
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A piezoelectric valve comprising: a fixed portion defining an opening; and a number of movable portions extending from the fixed portion over the opening and separated from one another by radially oriented slits, each movable portion of the number of movable portions comprising a first material layer and a second material layer, and at least one of the first material layer or the second material layer comprises a piezoelectric material that is operable to drive a displacement of the movable portion in a direction opposite to an adjacent movable portion sharing a same radially oriented slit upon application of a voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.