Quadrature bias error reduction for vibrating structure gyroscopes
US12382834B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2021 |
| Grant date | Aug 5, 2025 |
| Priority date | — |
| Expiry date | Jun 6, 2044 |
Classification
- Technology area (CPC —)General
Abstract
A vibrating structure angular rate sensor includes a mount, a planar vibrating structure and a plurality of compliant supports extending between the mount and the planar vibrating structure to support the vibrating structure thereby allowing the planar vibrating structure to oscillate in its plane relative to the mount in response to an electrical excitation. A first set of transducers is arranged on the planar vibrating structure to apply, in use, an electrical excitation to the planar vibrating structure and to sense, in use, motion resulting from oscillation of the planar vibrating structure in its plane. A plurality of capacitive regions is fixed at a distance from the planar vibrating structure in its plane. The capacitive regions form a second set of transducers configured to apply, in use, an electrostatic force to the planar vibrating structure which induces a change in the frequency of oscillation of the planar vibrating structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.