Etchant
US12384967B2 · kind B2 · utility
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4References
20Claims
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Key dates
| Filing date | Feb 15, 2023 |
| Grant date | Aug 12, 2025 |
| Priority date | — |
| Expiry date | Nov 5, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/621
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An etchant including: persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid; sulfate; and water, wherein a tip control index (Y) of the etchant is a value of at least about 45.0 and not more than about 70.0, the tip control index (Y) being a value calculated by Equation 1: Y=1.0×10−3×M(X1)+1.0×10−1×M(X2)+5.0×10−2×M(X3)+1.5×M(X1)×M(X2)+2.0×10−1×M(X1)×M(X3)+2.0×10−1×M(X2)×M(X3) Equation 1 The description of Equation 1 is as in the specification.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.