Patent · US Active

Barrier layer system and method for producing a barrier layer system

US12385134B2 · kind B2 · utility

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1References

8Claims

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Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Emmy Törker · Dresden, DE
Franz Selbmann · Chemnitz, DE
Claudia Keibler-Willner · Dresden, DE
Mario Baum · Scharfenstein, DE
Maik Wiemer · Limbach-Oberfrohna, DE

Key dates

Filing date	Sep 23, 2022
Grant date	Aug 12, 2025
Priority date	—
Expiry date	Mar 22, 2043

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB05D1/60
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A layer system includes barrier properties against oxygen and water vapor. There may be an alternating layer system of at least two aluminum oxide layers and at least two titanium oxide layers. The aluminum oxide layers and the titanium oxide layers are deposited alternately on top of one another. The aluminum oxide layers and the titanium oxide layers are deposited by ALD layer deposition with a layer thickness of 5 nm to 20 nm. A first Parylene layer is deposited with a layer thickness of 0.1 μm to 50 μm on a first side of the alternating layer system by CVD.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.